Optical characterization of mass-productive metal-insulator-metal plasmonic waveguide with a linear taper for nanofocusing
Author
Wongpanya K. Pijitrojana W.
Affiliations
National Electronics and Computer Technology Center National Science and Technology Development Agency Ministry of Higher Education Science Research and Innovation 112 Thailand Science Park Phahonyothin Road Khlong Nueng Khlong Luang Pathum Thani 12120 Thailand; Electrical and Computer Engineering Department Thammasat School of Engineering Thammasat University Khlong Nueng Klong Luang Pathum Thani 12120 Thailand
Type
Article
Source Title
Optics Express
ISSN
10944087
Year
2024
Volume
32
Issue
1
Page
677-690
Open Access
All Open Access Gold
Publisher
Optica Publishing Group (formerly OSA)
DOI
10.1364/OE.488141
Abstract
This paper conducts an experimental evaluation of the optical properties of massproductive metal-insulator-metal linear taper waveguides for nanofocusing. The vertical linear tapers with controlled angles in the 12-51 degrees range were realized with dry etching and mixed gas while tip-thickness was precisely controlled with atomic layer deposition. The transmission efficiency of the linear taper was measured employing an input grating and a single output slit. The maximum transmission efficiency was estimated at 64% at a taper angle of 30 degrees which aligned with the calculations. This experimental evaluation provides guidance for the design of practical nanofocusing components. ? 2023 Optica Publishing Group.
